14/30259233 DC
14/30259233 DC
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14/30259233 DC

BS EN 62047-16. Semiconductor devices. Micro-electromechanical devices. Part 16. Test methods for determining residual stresses of MEMS films; wafer curvature and cantilever beam deflection methods

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14/30259233 DC

BS EN 62047-16. Semiconductor devices. Micro-electromechanical devices. Part 16. Test methods for determining residual stresses of MEMS films; wafer curvature and cantilever beam deflection methods

Purchase Options: Immediate PDF Download

Printed publication for Next Day or Standard Delivery
Price:  £20 (50% discount for members - click here for more information)

14/30259233 DC

BS EN 62047-16. Semiconductor devices. Micro-electromechanical devices. Part 16. Test methods for determining residual stresses of MEMS films; wafer curvature and cantilever beam deflection methods

Purchase Options: Immediate PDF Download

Printed publication for Next Day or Standard Delivery
Price:  £20 (50% discount for members - click here for more information)
Product details for 14/30259233 DC
Category: ELECTRONICS

Publication date: 2014-02-11

Product detail: 13 pages

ISBN reference: 978 0 580 78078 3

Cross references to standards relating to 14/30259233 DC:

Keywords: Semiconductor devices, Electronic equipment and components, Electromechanical devices, Vocabulary, Terminology, Semiconductor technology, Integrated circuits

Variations and abbreviations: 14/30259233DC,14/30259233 DC

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