ASTM F1238 - 95(2011)
ASTM F1238 - 95(2011)
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ASTM F1238 - 95(2011)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

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ASTM F1238 - 95(2011)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Purchase Options: Immediate PDF Download

Printed publication for Next Day or Standard Delivery
Price:  £36 (50% discount for members - click here for more information)

ASTM F1238 - 95(2011)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Purchase Options: Immediate PDF Download

Printed publication for Next Day or Standard Delivery
Price:  £36 (50% discount for members - click here for more information)
Product details for ASTM F1238 - 95(2011)
Category: ELECTRONICS

Publication date: 2011-01-06

Product detail: 3 pages

ISBN reference: 978 0 580 68141 7

Cross references to standards relating to ASTM F1238 - 95(2011):

Keywords: Density, Microelectronics, Molybdenum disilicide, Refractory silicides, Sputtering, Sputtering targets, Tantalum disilicide, Titanium disilicide, Tungsten disilicide, Electrical conductors (semiconductors)-specifications, Electronic materials/applications-specifications, Metallic silicide, Molybdenum (electronic applications)-specifications, Polycaprolactone (PCL), Refractory silicide targets, Silicides, Tantalum (Ta)/tantalum alloys-specifications, Targets, Titanium silicide, Tungsten silicide (WSix)

Variations and abbreviations: ASTMF1238-95(2011),ASTMF1238,ASTM F1238
Standards in the ASTM F1238 series:  ASTM F1238 - 95(2003)   ASTM F1238 - 95(2011)  


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